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Concentrated in the Rousset-Peynier basin (Bouches-du-Rhône), the regional production of semi-conductors demands continuous optimisation of the quality of the technologies developed and produced in manufacturing lines. Faced with the worldwide competition, the success of its competitiveness depends both on the cost price and the added value.
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The CIM PACA Characterization platform provides with means to support design, test and validation of new pre-industrial technologies which combine performance, quality, efficiency and reliability at the highest level.
The essential partnership between research and industry, which will be strengthened thanks to this platform, is concerned with the development of methods and tools for the physico-chemical and electrical characterization of technologies based on non-volatile memories.
Physical, chemical and electrical characterization
Failure analysis
Metrology
Ultra cleanliness
The platform provides services within the areas of:
- The physico-chemical materials
- Analysis of component failure
These services are offered:
- Its contributors Members (Atmel Biophy Research, IBS, Nexcis, Presto Engineering, Probion Analysis, STMicroelectronics, Tera Environment, University Paul Cézanne)
- Entities third non-members on request (external services)
The facilities are operated by specialists seconded to the platform by members, which allows for the facilities (including provision of a detailed analysis report)
The platform has been authorized under the Research Tax Credit (ITC): therefore, the R & D can be taken into account as part of the research tax credit
For more information, contact:
Pascal GALAND - DirectorOffice:
tel: +33 (0) 4 42 68 88 45
Mobile: +33 (0) 6 80 53 49 83
E-mail: @ pascal.galand caracterisation.org

| Equipement available and service offer
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Equipment/Techniques :
Characterization: D-SIMS, Auger, FIB, TEM, SEM, XPS, Raman, ToF-SIMS, AFM, SRP, optical microscopes, ESD test benches, very low current tester
Failure Analysis: static and dynamic light emission microscope and thermal and photoelectrical laser stimulation bench, nano-probing
Metrology & Ultra cleanliness: UV+visible ellipsometer, slurry control, PTR-MS, ATD GC MS
Documents to download

LFoundry
Biophy Research
IBS
STMicroelectronics
Université Paul Cézanne (Aix-Marseille 3)
The equipment of the platform is shared by the industrials and has been cofinanced by :

| Associated Members and partners
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Firms :
ATMEL
Kemesys
Nexcis
Presto Engineering
Orsay Physics
Probion
Rockwood Wafer reclaim
Silios
Tera Environnement
Vegatec
Public laboratories :
CEREGE
CRHEA
CRMC-N
Institut Fresnel
L2MP
LCE
TECSEN CP2M
Rousset (Bouches-du-Rhône) - France
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caracterisation@arcsis.org
BP 19, Place Paul Borde 13790 Rousset - France
tél :+33 (0) 4 42 53 81 50 fax : +33 (0) 4 42 53 81 51
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Fichier(s) à télécharger :
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